- 书名：EUV Lithography (SPIE Press Monograph Vol. PM178)
- 出版社：SPIE Publications
- 作者：Vivek Bakshi
- 出版年份：2008
- 电子书格式： pdf
- 简介：Dive into the world of EUV lithography with Vivek Bakshi’s comprehensive guide, “EUV Lithography (SPIE Press Monograph Vol. PM178)”. Published in 2008 by SPIE Publications, this book offers an in-depth exploration of this critical semiconductor manufacturing technology. Learn about the principles, challenges, and advancements in EUV lithography, from source development to resist materials and metrology. Ideal for researchers, engineers, and students in the field of microfabrication and nanotechnology. This essential resource provides a solid foundation for understanding this cutting-edge technology and its impact on the future of electronics.
- ISBN：9780819469649, 08194
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