- 书名：Field Guide to Optical Lithography
- 出版社：SPIE Publications
- 作者：Chris A. Mack
- 出版年份：2006
- 电子书格式： pdf
- 简介：Dive into the comprehensive world of optical lithography with Chris A. Mack’s “Field Guide to Optical Lithography.” This essential guide, published by SPIE Publications in 2006, provides an in-depth understanding of the principles, techniques, and applications of this critical semiconductor manufacturing process. Ideal for students, researchers, and professionals in microfabrication and nanotechnology, this book covers key concepts such as resolution, depth of focus, process windows, and resist technology. Enhance your expertise in optical lithography and stay ahead in this ever-evolving field.
- ISBN：9780819462077, 08194
- 下载地址（点击下载）：
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